​​Double-Side Polished High-Purity SiC Mirror Optical Component for MEMS Micromirror

1. Ultra-Lightweight & Miniaturization​​:

• The ​​compact design (e.g., 20–50mm diameter)​​ combined with SiC’s ​​low density (~3.1 g/cm³)​​ achieves ​​extremely light weight​​ and a ​​compact structure​​, making it ideal for space- and weight-sensitive integrated equipment.

2. ​​Superior Stability & Environmental Resistance​​:

• The ​​low coefficient of thermal expansion (~4.5×10⁻⁶/℃)​​ and ​​high elastic modulus (>400 GPa)​​ ensure ​​exceptional dimensional and surface stability​​ under temperature fluctuations and mechanical vibrations, with strong resistance to deformation.

3. ​​Excellent Thermal Management​​:

• ​​High thermal conductivity (~120–200 W/m·K)​​ facilitates rapid and uniform heat dissipation, preventing local hot spots and ensuring stable performance and reliability of optical systems under high-temperature or high-power conditions.

4. ​​Top-Tier Optical Surface Quality​​:

• Through ​​double-side polishing technology​​, it achieves ​​nanoscale surface smoothness (Ra ≤ 0.5 nm) on both sides​​ and ​​ultra-high flatness/parallelism​​, minimizing light scattering and loss while ensuring high imaging quality.

5. ​​Outstanding Durability & Chemical Inertness​​:

• ​High hardness (Mohs 9.5)​​ provides wear and scratch resistance, and ​​resistance to acids, alkalis, and plasma erosion​​ ensures long-term performance in harsh environments, extending service life.

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​AR/MR Glasses Optical Systems​​:

As ​​diffractive waveguide lenses, prisms, or reflectors​​ for guiding and displaying light paths. Their ​​high refractive index (~2.65), lightweight, and small size​​ are key to achieving ​​slim glasses design, large field of view (FOV), and elimination of rainbow patterns​​.

• ​​Semiconductor Lithography & Precision Inspection Equipment​​:

As ​​reflectors or lens substrates​​ in the illumination systems of ​​lithography machines​​ or sensors of ​​wafer inspection equipment​​. Their ​​high thermal stability and flatness​​ are crucial for maintaining ​​nanoscale overlay accuracy and inspection precision​​.

• ​​High-End Laser Optical Systems​​:

Used in ​​laser galvanometers, laser interferometers​​, or as ​​reflectors/window mirrors in high-power lasers​​. Their ​​high damage threshold, high thermal conductivity, and stability​​ ensure ​​precise laser beam steering and long-term stable system operation​​.

• ​​MEMS & Micro-Optics Fields​​:

As ​​substrate materials for MEMS micromirrors​​ or ​​substrates for micro-optical devices​​, applied in LiDAR, projectors, etc., meeting stringent requirements for ​​high-frequency response, high stability, and miniaturization​​.

ZMSH's SiC Ceramic Products

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